The Phase shift MicroXam is a non contact 3D surface profiler which measures roughness, finish and texture of surfaces.
Interferometres ude the natural wave properties of light , reflected from a surface, to map the tinest surface height variations.
Features:
- Comprehensive graphical software for the aquisition, analysis, manipulation, and visualisation of data.
- Calculation of surface statistics including summit and valley analysis
- Fourier and autocovariance analysis and surface filtering
- Polynomial fitting, data filtering, scaling, masking and interpolation
- Interactive zoom
- X-Y and line segment profiles
- 3D wire, hybrid and solid plots
- Area difference plot step height measurement
- Fourier analysis for visualising and chacterising periodic structures in surface maps
Applications:
- Biomedical Optics eg.contact lens surface measurement
- Hard Disk and Magnetic Media eg. 3D characterisation
- Optics eg. telescope manufacture (Hubble telescope)
- Polymer surface roughness
- Bearing surface wear
- Silicon Wafer Step Height
- Thick Film Conductor Thickness
Specifications
- Objective Magnification :50x
- Numerical Aperture :0.55
- Measurment Area :82×62um, 132×100um, 165×125um, 264×200um
- Spatial Sampling :0.22×0.26um
- Working Distance :3.4mm
- Depth of Focus :1.16um
- Maximum Surface Slope :22.6º
- RMS Repeatability (Phase shifting mode) :0.1nm
- RMS Repeatability (Extended mode) :0.1nm
- Vertical scan range :30 microns, 100 microns or 5mm
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