SU 6600 FESEM Technical specifications

Secondary electron image resolution
1.2nm (Vacc: 30kV, WD = 5mm, Mag: 180kX)
3.0nm (Vacc: 1kV, WD = 4mm, Mag: 80kX)
4.5nm*1 (Vacc: 30kV, WD = 5mm, Mag: 50kX, 150Pa)

Backscattered electron image resolution
3.5nm (Vacc: 30kV, WD = 8mm, Mag: 80kX, 10Pa)
Magnification
10 – 600,000X (at displayed image size is 127 × 96mm)
Electron optics
Electron gun ZrO/W Schottky emission electron source
Probe current 1pA – 200nA Accelerating Voltage 0.5 – 30kV (0.1kV step)
Lens system
Objective lens Movable aperture (heating type. 4 openings selectable from outside of vacuum
with fine adjustment mechanism, 200-100-50-30μm)
Stigmator coil Octopole electromagnetic system (X, Y)
Scanning coil 2-stage electromagnetic deflection
Beam blanking Electromagnetic type (for image freezing)
Specimen stage
Stage control 5-axis computer eucentric motor drive
Movable range
X: 0 – 110mm Y: 0 – 110mm Z: 4 – 40mm T: –5° – +70° R: 360°
Sample size
(maximum) 150mm diameter × 40mm(H)

Electrical image shift
±50μm (WD= 15 mm)
Detector
Secondary electron detector
Backscattered electron detector

The cyrotransfer stage allows imaging and analysis of biological and other hydrated, beam or vacuum sensitive specimens. Cryo-SEM imaging does not dehydrate the sample ensuring that delicate structures are maintained without shrinkage.